TY - GEN
T1 - Robust PID control for a micro-actuator with structural uncertainty
AU - Vagia, Marialena
AU - Koveos, Yannis
AU - Nikolakopoulos, George
AU - Tzes, Anthony
PY - 2006
Y1 - 2006
N2 - In this article the effects of unaccounted structural dynamics within the control scheme of a micro-Actuator (μ - A) are presented. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible's plate motion is constrained by hinges acting as a combination of springs and dashpots. The dynamic model of the μ - A allows both linear and angular movements of the plate. Rather than designing a controller for the augmented system, a simplified robust PID control law for the reduced model is employed. The reduced non linear model (RnM) assumes only linear motion for the μ-capacitor's plate. The RnM is linearized at multiple operating points, and the designed PID-controller, tuned via LMI-theory, stabilizes all linear modes. The overall scheme comprises: a) a feedforward controller which stabilizes the micro-actuator around its nominal operating points, and b) a robust PID controller which handles deviations from the operating points. The resulting overall control scheme is applied to the non linear (bimodal structure) of a μ - A, where simulation results are used to investigate the efficacy of the suggested control architecture.
AB - In this article the effects of unaccounted structural dynamics within the control scheme of a micro-Actuator (μ - A) are presented. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible's plate motion is constrained by hinges acting as a combination of springs and dashpots. The dynamic model of the μ - A allows both linear and angular movements of the plate. Rather than designing a controller for the augmented system, a simplified robust PID control law for the reduced model is employed. The reduced non linear model (RnM) assumes only linear motion for the μ-capacitor's plate. The RnM is linearized at multiple operating points, and the designed PID-controller, tuned via LMI-theory, stabilizes all linear modes. The overall scheme comprises: a) a feedforward controller which stabilizes the micro-actuator around its nominal operating points, and b) a robust PID controller which handles deviations from the operating points. The resulting overall control scheme is applied to the non linear (bimodal structure) of a μ - A, where simulation results are used to investigate the efficacy of the suggested control architecture.
KW - MEMS
KW - Robust PID control
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U2 - 10.1109/MED.2006.328778
DO - 10.1109/MED.2006.328778
M3 - Conference contribution
AN - SCOPUS:35948942247
SN - 0978672003
SN - 9780978672003
T3 - 14th Mediterranean Conference on Control and Automation, MED'06
BT - 14th Mediterranean Conference on Control and Automation, MED'06
T2 - 14th Mediterranean Conference on Control and Automation, MED'06
Y2 - 28 June 2006 through 30 June 2006
ER -