Robust PID control for a micro-actuator with structural uncertainty

Marialena Vagia, Yannis Koveos, George Nikolakopoulos, Anthony Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article the effects of unaccounted structural dynamics within the control scheme of a micro-Actuator (μ - A) are presented. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible's plate motion is constrained by hinges acting as a combination of springs and dashpots. The dynamic model of the μ - A allows both linear and angular movements of the plate. Rather than designing a controller for the augmented system, a simplified robust PID control law for the reduced model is employed. The reduced non linear model (RnM) assumes only linear motion for the μ-capacitor's plate. The RnM is linearized at multiple operating points, and the designed PID-controller, tuned via LMI-theory, stabilizes all linear modes. The overall scheme comprises: a) a feedforward controller which stabilizes the micro-actuator around its nominal operating points, and b) a robust PID controller which handles deviations from the operating points. The resulting overall control scheme is applied to the non linear (bimodal structure) of a μ - A, where simulation results are used to investigate the efficacy of the suggested control architecture.

Original languageEnglish (US)
Title of host publication14th Mediterranean Conference on Control and Automation, MED'06
DOIs
StatePublished - 2006
Event14th Mediterranean Conference on Control and Automation, MED'06 - Ancona, Italy
Duration: Jun 28 2006Jun 30 2006

Publication series

Name14th Mediterranean Conference on Control and Automation, MED'06

Other

Other14th Mediterranean Conference on Control and Automation, MED'06
CountryItaly
CityAncona
Period6/28/066/30/06

Keywords

  • MEMS
  • Robust PID control

ASJC Scopus subject areas

  • Computer Science Applications
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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