Robust PID controller design for a micro-actuator with squeezed gas film damping effects

Marialena Vagia, Anthony Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article the modeling aspects of an electrostatic microactuator with squeezed thin film damping effects are presented. The $mu$- Actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air. Its highly nonlinear dynamic model is linearized at various operating points. A robust PID-controller is designed with its parameters-tuning relying on LMIs. This control effort of the PID-controller in collaboration with a feedforward term and a notch filter is applied to the system. Simulation results are used to investigate the efficacy of the suggested control architecture.

Original languageEnglish (US)
Title of host publicationProceedings of the 17th World Congress, International Federation of Automatic Control, IFAC
Edition1 PART 1
DOIs
StatePublished - 2008
Event17th World Congress, International Federation of Automatic Control, IFAC - Seoul, Korea, Republic of
Duration: Jul 6 2008Jul 11 2008

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
Number1 PART 1
Volume17
ISSN (Print)1474-6670

Other

Other17th World Congress, International Federation of Automatic Control, IFAC
CountryKorea, Republic of
CitySeoul
Period7/6/087/11/08

Keywords

  • Microactuators
  • Microsystems
  • Modelling

ASJC Scopus subject areas

  • Control and Systems Engineering

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