@inproceedings{8d6945bd64394e12966fe88cf2c51760,
title = "Robust PID controller design for a micro-actuator with squeezed gas film damping effects",
abstract = "In this article the modeling aspects of an electrostatic microactuator with squeezed thin film damping effects are presented. The $mu$- Actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air. Its highly nonlinear dynamic model is linearized at various operating points. A robust PID-controller is designed with its parameters-tuning relying on LMIs. This control effort of the PID-controller in collaboration with a feedforward term and a notch filter is applied to the system. Simulation results are used to investigate the efficacy of the suggested control architecture.",
keywords = "Microactuators, Microsystems, Modelling",
author = "Marialena Vagia and Anthony Tzes",
note = "Funding Information: ⋆ This paper was partially supported by University of Patras{\textquoteright} K. Karatheodoris research initiative program no. C.152 Copyright: Copyright 2013 Elsevier B.V., All rights reserved.; 17th World Congress, International Federation of Automatic Control, IFAC ; Conference date: 06-07-2008 Through 11-07-2008",
year = "2008",
doi = "10.3182/20080706-5-KR-1001.3543",
language = "English (US)",
isbn = "9783902661005",
series = "IFAC Proceedings Volumes (IFAC-PapersOnline)",
number = "1 PART 1",
booktitle = "Proceedings of the 17th World Congress, International Federation of Automatic Control, IFAC",
edition = "1 PART 1",
}