Selective silicon nanoparticle growth on high-density arrays of silicon nitride

Engineering & Materials Science

• Adatoms 100%
• Silicon nitride 79%
• Nanoparticles 64%
• Silicon 51%
• Block copolymers 18%
• Styrene 14%
• Etching 14%
• Nucleation 13%
• Thin films 12%
• Fluxes 10%
• Wire 9%
• Substrates 9%
• Temperature 5%

Chemical Compounds

• Silicon Nanoparticle 90%
• Nitride 63%
• Nanoparticle 32%
• Chemical Vapour Deposition 29%
• Disilane 23%
• Cylinder 17%
• Diblock Copolymer 16%
• Etching 14%
• Size Distribution 14%
• Methacrylate 13%
• Nucleation 13%
• Surface 10%
• Diffusion 10%

Physics & Astronomy

• silicon nitrides 63%
• adatoms 53%
• nanoparticles 44%
• silicon 35%
• vapor deposition 20%
• masking 14%
• copolymers 12%
• density distribution 12%
• templates 12%
• polystyrene 11%
• etching 9%
• trends 9%
• nucleation 9%
• wire 9%
• thin films 6%