The brain operates on many different scales, from individual neurons to interacting cortical areas. Similarly, electrophysiology can monitor neural activity at a variety of spatial resolutions. Yet the majority of electrophysiology studies focus on a single scale of measurements. Simultaneously monitoring neural activity at multiple spatial scales will be critical for better understanding neural processing and developing neuroprosthetic applications. Here, we address the technical challenge of integrating multiple recording modalities into a chronic recording system. We developed a semi-chronic chamber-based system for non-human primates to simultaneously record subdural micro-electrocorticography (μECoG), local field potentials (LFPs) and action potentials in the same tissue volume. The system combines subdural μECoG array recordings with a microdrive and uses a chamber system and artificial duras to align each component. We present the system design and validation of subdural μECoG recordings using artificial duras. Acute recordings from one non-human primate subject are shown to validate the technique.