Simulation study of a capacitively coupled plasma torch array

E. Koretzky, S. P. Kuo

Research output: Contribution to journalConference articlepeer-review

Abstract

An array of air plasma torches can be lit up simultaneously by a single common AC source using capacitors as ballasting circuit elements to prevent voltage shortage in the other electrode pairs due to the discharge in one pair. The set-up is modeled as coupled resistance-inductance-capacitance circuits, each electrode pair in the presence of the plasma torch is represented by a parallel resistance-capacitance circuit. The dynamics of the plasma is described by the rate equations of the electrons, positive ions and negative ions. The results for the voltage and current functions of the ballasting capacitors, the source, and the electrode pairs are obtained, and compare favorably with experimental measurements.

Original languageEnglish (US)
Number of pages1
JournalIEEE International Conference on Plasma Science
StatePublished - 1998
EventProceedings of the 1998 IEEE International Conference on Plasma Science - Raleigh, NC, USA
Duration: Jun 1 1998Jun 4 1998

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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