Surface smoothening mechanism of plasma-deposited amorphous silicon thin films

Mayur S. Valipa, Tamas Bakos, Eray S. Aydil, Dimitrios Maraudas

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish (US)
Number of pages1
StatePublished - 2005
Event05AIChE: 2005 AIChE Annual Meeting and Fall Showcase - Cincinnati, OH, United States
Duration: Oct 30 2005Nov 4 2005

Other

Other05AIChE: 2005 AIChE Annual Meeting and Fall Showcase
CountryUnited States
CityCincinnati, OH
Period10/30/0511/4/05

ASJC Scopus subject areas

  • Engineering(all)

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