Skip to main navigation
Skip to search
Skip to main content
NYU Scholars Home
Help & FAQ
Home
Profiles
Research Units
Research output
Search by expertise, name or affiliation
Theoretical and Experimental Investigations of Chlorine RF Glow Discharges: I. Theoretical
Eray S. Aydi
, Demetre J. Economou
Chemical and Biomolecular Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
Overview
Fingerprint
Fingerprint
Dive into the research topics of 'Theoretical and Experimental Investigations of Chlorine RF Glow Discharges: I. Theoretical'. Together they form a unique fingerprint.
Sort by
Weight
Alphabetically
Physics & Astronomy
chlorine
71%
glow discharges
67%
reactors
38%
electron impact
33%
coefficients
27%
Boltzmann transport equation
21%
plasma etching
19%
parallel plates
17%
plots
13%
methodology
13%
spacing
13%
electrodes
10%
kinetics
10%
electric fields
9%
geometry
9%
silicon
9%
predictions
9%
Chemical Compounds
Glow Discharge
80%
Chlorine
59%
Electron Impact
51%
Plasma
41%
Surface Recombination
34%
Pressure
26%
Electron Density
20%
Etching
20%
Electric Field
20%
Plate Like Crystal
17%
Behavior as Electrode
11%
Liquid Film
10%
Engineering & Materials Science
Glow discharges
100%
Chlorine
82%
Plasmas
46%
Electrons
33%
Plasma etching
25%
Carrier concentration
23%
Polysilicon
19%
Electric fields
15%
Silicon
13%
Electrodes
12%
Geometry
10%