Theoretical study of the interactions of SiH2 radicals with silicon surfaces

Shyam Ramalingam, Pushpa Mahalingam, Eray S. Aydil, Dimitrios Maroudas

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Theoretical study of the interactions of SiH2 radicals with silicon surfaces'. Together they form a unique fingerprint.

Keyphrases

Material Science

Physics

Chemical Engineering

Engineering