Thin-film ruthenium dioxide coatings via ozone-mediated chemical vapor deposition

R. Hashaikeh, I. S. Butler, J. A. Kozinski

Research output: Contribution to journalArticlepeer-review


Thin films of RuO2 are attracting considerable interest lately, because of their various applications as advanced materials in the chemical and electronics industries. In this work, a coating technique has been developed that results in the formation of homogenous RuO2 coatings on stainless steel substrates. Metallic Ru is first vaporized using ozone (O3) to form a gaseous mixture of RuO4, air and ozone. Then, the RuO4 is reduced and deposited as a thin RuO2 film on a hot (400 °C) stainless steel substrate. The coating produced has a needle-like structure, which leads to a significant increase in the surface area of the RuO2 coating. The stainless steel substrate tends to oxidize under the experimental conditions employed with the formation of a CrOx surface layer. As a result of the presence of this CrOx layer, the RuO2 films have good adhesion to the substrate.

Original languageEnglish (US)
Pages (from-to)1918-1921
Number of pages4
JournalThin Solid Films
Issue number4
StatePublished - Dec 5 2006


  • Catalyst
  • Chemical vapor deposition (CVD)
  • RuO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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