Time-resolved investigation of pulsed-DC magnetron reactive plasma

Keyphrases

• Reactive Plasma 100%
• Dielectric Oxide 50%
• Positive Charge 50%
• Plasma Dynamics 50%
• Charge Accumulation 50%
• Pressure Pulse 50%
• Measurement Techniques 50%
• Oxide Film 50%
• Deposition Process Parameters 50%
• Metal Target 50%

Engineering

• Process Parameter 50%
• Metal Target 50%
• Oxide Film 50%

Material Science

• Oxide Film 100%