Ultra low-temperature epitaxial growth of compressively strained Si directly on Si substrates

Davood Shahrjerdi, B. Hekmatshoar, Stephen W. Bedell, J Ott, Marinus Hopstaken

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication221st ECS meeting, 2012
StatePublished - 2012

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