Ultra low-temperature epitaxial growth of compressively strained Si directly on Si substrates

Davood Shahrjerdi, B. Hekmatshoar, Stephen W. Bedell, J Ott, Marinus Hopstaken

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication221st ECS meeting, 2012
StatePublished - 2012

Cite this

Shahrjerdi, D., Hekmatshoar, B., Bedell, S. W., Ott, J., & Hopstaken, M. (2012). Ultra low-temperature epitaxial growth of compressively strained Si directly on Si substrates. In 221st ECS meeting, 2012